The Modeling and Control of the Cluster Tool in Semiconductor Fabrication
نویسندگان
چکیده
A single wafer processing IC fabrication with flexible and distributed configuration is getting more important. The cluster tool is such an IC fabrication equipment. It consists of the cassette module, transport module, and process module. In this paper, the model of a cluster tool is constructed using distributed colored timed Petri net (DCTPN). The emulator and controller of the cluster tool are further constructed. The standards of SECS, HSMS and GEM are used to develop the intelligent module controller. Finally, the web-based remote controller is developed and the SPC module is built in the cluster tool. Keyword: cluster tool, distributed colored timed Petri net, intelligent module controller, web-based remote controller.
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